Wiktionary
trichlorosilane
n. (context inorganic compound English) The compound SiHCl3 which is the silicon analogue of chloroform
Wikipedia
Trichlorosilane
Trichlorosilane is an inorganic compound with the formula HSiCl. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a silicone polymer while giving off hydrochloric acid. Because of its reactivity and wide availability, it is frequently used in the synthesis of silicon-containing organic compounds.
Trichloro(dichlorophenyl)silane
Trichloro(dichlorophenyl)silane is a compound with formula Si(CHCl)Cl.
Trichloro(chloromethyl)silane
Trichloro(chloromethyl)silane is a compound with formula Si(CHCl)Cl.