Wiktionary
nitrogen trifluoride
n. (context chemistry English) The binary compound of nitrogen and fluorine, NF3; a corrosive gas.
Wikipedia
Nitrogen trifluoride
Nitrogen trifluoride is the inorganic compound with the formula NF. This nitrogen- fluorine compound is a colorless, odorless, nonflammable gas. It finds increasing use as an etchant in microelectronics.