Wikipedia
A microscanner (or micro-scanning mirror) is a micro-opto-electromechanical system (MOEMS) in the category of micro-mirror actuators for dynamic light modulation. Depending upon the type of microscanner the modulatory movement of a single mirror can be either translatory or rotational, on one or two axes. In the first case, a phase shifting effect takes place. In the second case, the incident light wave is deflected.
Therefore, they have to be differentiated from spatial light modulators, other micro-mirror actuators which need a matrix of individually addressable mirrors for their mode of operation. If a single array mirror already fulfils the desired modulation but is operated in parallel with other array mirrors in order to increase the light yield, then the term microscanner array is used.