Wiktionary
microelectromechanical
a. Describing any very small electromechanical system or device that is larger than a nanoelectromechanical one.
Wikipedia
Usage examples of "microelectromechanical".
Technologies being developed in the area of microelectromechanical systems, in particular, hold promise for enabling capable and inexpensive sensor fields.
Nano- and Microelectromechanical Systems: Fundamentals of Nano- and Microengineering.
Built around nanotechnologies, the microelectromechanical systems combined computers with tiny semiconductor chips.