Wiktionary
microactuator
n. A microscopic actuator, especially one on a silicon chip
Wikipedia
Microactuator
A microactuator is a microscopic servomechanism that supplies and transmits a measured amount of energy for the operation of another mechanism or system. As a general actuator, following standards have to be met.
- Large travel
- High precision
- Fast switching
- Low power consumption
- Power free force sustainability
For microactuator, there are two in addition
- Microstructurability
- Integrability