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Wiktionary
microactuator

n. A microscopic actuator, especially one on a silicon chip

Wikipedia
Microactuator

A microactuator is a microscopic servomechanism that supplies and transmits a measured amount of energy for the operation of another mechanism or system. As a general actuator, following standards have to be met.

  • Large travel
  • High precision
  • Fast switching
  • Low power consumption
  • Power free force sustainability

For microactuator, there are two in addition

  • Microstructurability
  • Integrability