Wikipedia
Isobutylgermane
Isobutylgermane (IBGe, Chemical formula: (CH)CHCHGeH), is an organogermanium compound. It is a colourless, volatile liquid that is used in MOVPE ( Metalorganic Vapor Phase Epitaxy) as an alternative to germane. IBGe is used in the deposition of Ge films and Ge-containing thin semiconductor films such as SiGe in strained silicon application, and GeSbTe in NAND Flash applications.