Wikipedia
Duoplasmatron
The Duoplasmatron is an ion source in which a cathode filament emits electrons into a vacuum chamber. A gas such as argon is introduced in very small quantities into the chamber, where it becomes charged or ionized through interactions with the free electrons from the cathode, forming a plasma. The plasma is then accelerated through a series of at least two highly charged grids, and becomes an ion beam, moving at fairly high speed from the aperture of the device.