What is "dichlorosilane"

n. (context inorganic compound English) The gas SiH₂Cl₂ that is used to grow silicon nitride crystals for semiconductors

Dichlorosilane, or DCS as it is commonly known, is a chemical compound with the formula HSiCl. In its major use, it is mixed with ammonia (NH) in LPCVD chambers to grow silicon nitride in semiconductor processing. A higher concentration of DCS:NH (i.e. 16:1), usually results in lower stress nitride films.

It is an intermediate between silane and silicon tetrachloride.