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Tetraethyl orthosilicate

Tetraethyl orthosilicate is the chemical compound with the formula Si(OCH). Often abbreviated TEOS, it is a colorless liquid that degrades in water. TEOS is the ethyl ether of orthosilicic acid, Si(OH). It is a prototypical alkoxide.

TEOS is a tetrahedral molecule. Like its many analogues, TEOS is prepared by alcoholysis of silicon tetrachloride:

SiCl + 4 EtOH → Si(OEt) + 4 HCl

where Et = CH.